The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 15, 2019

Filed:

Aug. 12, 2016
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Shinsuke Ikeuchi, Nagaokakyo, JP;

Toshimaro Yoneda, Nagaokakyo, JP;

Yoshitaka Matsuki, Nagaokakyo, JP;

Naoyuki Endo, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); C01G 33/00 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1873 (2013.01); C01G 33/006 (2013.01); C23C 14/088 (2013.01); H01L 41/047 (2013.01); H01L 41/081 (2013.01); H01L 41/187 (2013.01); C01P 2002/72 (2013.01); C01P 2002/74 (2013.01); C01P 2006/40 (2013.01);
Abstract

A piezoelectric thin film contains potassium sodium niobate represented by general formula (KNa)NbOand CaTiO, wherein the lattice spacing calculated from the diffraction peak of the (001) plane in an X-ray diffraction profile of the piezoelectric thin film is 3.975 Å or less, and the ratio I/Iof the diffraction peak intensity Iof the (101) plane to the diffraction peak intensity Iof the (001) plane in the X-ray diffraction profile of the piezoelectric thin filmsatisfies the relationship log(I/I)≤−2.10.


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