The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2019
Filed:
May. 16, 2017
Wuhan China Star Optoelectronics Technology Co., Ltd., Wuhan, CN;
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD., Wuhan, Hubei, CN;
Abstract
The invention provides a TFT substrate manufacturing method and TFT substrate. The TFT substrate manufacturing method first etches the gate insulation layer to form two first through-holes and forming two bridging metal blocks inside the two first through holes; then etches the interlayer dielectric layer to form two second through-holes connecting respectively the two first through-holes, the source and drain connecting the two bridging metal blocks respectively through the two second through-holes. By changing a conventional etching process into two etching process to form the through-hole structure on the gate insulation layer and interlayer dielectric layer, able to improve uniformity of the active layer, reduce process difficulty, avoid the problem of etching stopped due to higher etching thickness, and improve the product quality.