The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2019
Filed:
Dec. 15, 2014
Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;
Takayuki Fukushima, Takarazuka, JP;
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe-Shi, JP;
Abstract
A substrate position alignment device includes a plurality of rotary tables which hold a plurality of substrates to be vertically spaced apart from each other, a rotation drive device which synchronously rotates the plurality of rotary tables, a plurality of support elements which support the substrate on the rotary table, support element drive members which independently and horizontally move the plurality of support elements between inward positions and outward positions, and up-down devices which move up and down the plurality of support element drive members. The substrate position alignment device operates the rotation drive device, the support element drive members and the up-down device based on the positions of notches of the substrate, to align the notches of the plurality of substrates with a reference rotational angle position.