The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 15, 2019

Filed:

Nov. 09, 2017
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Pasquale Biancolillo, Pedara, IT;

Angelo Recchia, Fasano, IT;

Pasquale Franco, Reggio Calabria, IT;

Antonio Cicero, Palermo, IT;

Giuseppe Bruno, Paterno, IT;

Assignee:

STMicroelectronics S.r.l., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/739 (2006.01); G01N 27/18 (2006.01); G01N 33/00 (2006.01); B81B 7/02 (2006.01); B81B 7/04 (2006.01); G01N 30/66 (2006.01);
U.S. Cl.
CPC ...
G01N 27/18 (2013.01); B81B 7/02 (2013.01); B81B 7/04 (2013.01); G01N 33/0027 (2013.01); B81B 2201/02 (2013.01); B81B 2201/0278 (2013.01); G01N 30/66 (2013.01);
Abstract

A semiconductor gas sensor device includes a first cavity that is enclosed by opposing first and second semiconductor substrate slices. At least one conducting filament is provided to extend over the first cavity, and a passageway is provided to permit gas to enter the first cavity. The sensor device may further including a second cavity that is hermetically enclosed by the opposing first and second semiconductor substrate slices. At least one another conducting filament is provided to extend over the second cavity.


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