The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2019
Filed:
Nov. 09, 2017
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Pasquale Biancolillo, Pedara, IT;
Angelo Recchia, Fasano, IT;
Pasquale Franco, Reggio Calabria, IT;
Antonio Cicero, Palermo, IT;
Giuseppe Bruno, Paterno, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A semiconductor gas sensor device includes a first cavity that is enclosed by opposing first and second semiconductor substrate slices. At least one conducting filament is provided to extend over the first cavity, and a passageway is provided to permit gas to enter the first cavity. The sensor device may further including a second cavity that is hermetically enclosed by the opposing first and second semiconductor substrate slices. At least one another conducting filament is provided to extend over the second cavity.