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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10180392 B1

PDFFull Text
Date of Patent:
Jan. 15, 2019

Filed:

Apr. 22, 2015

Plasma processing detection indicator using inorganic substance as a color-change layer

Applicant:

Sakura Color Products Corporation, Osaka-shi, Osaka, JP;

Inventors:

Yu Yamakawa, Osaka, JP;

Kazuhiro Uneyama, Osaka, JP;

Keita Hishikawa, Osaka, JP;

Masayuki Nishi, Kyoto, JP;

Masahiro Shimizu, Kyoto, JP;

Assignee:

SAKURA COLOR PRODUCTS CORPORATION, Osaka-shi, JP;

Attorney:

Westerman, Hattori, Daniels & Adrian, LLP

Primary Examiner:

Jennifer Wecker

Int. Cl.
CPC ...
G01N 21/78 (2006.01); G01N 31/22 (2006.01); C01G 29/00 (2006.01); C01G 31/02 (2006.01); C01G 39/02 (2006.01); C01G 41/02 (2006.01); G01N 21/25 (2006.01); H01L 21/3065 (2006.01); C23C 16/50 (2006.01); C23C 16/52 (2006.01); G01N 21/75 (2006.01); C04B 35/453 (2006.01); C04B 35/495 (2006.01); C23C 24/00 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01J 37/244 (2006.01); G01N 21/71 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
G01N 21/255 (2013.01); C01G 29/00 (2013.01); C01G 31/02 (2013.01); C01G 39/02 (2013.01); C01G 41/02 (2013.01); C04B 35/453 (2013.01); C04B 35/495 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); C23C 24/00 (2013.01); G01N 21/75 (2013.01); G01N 21/78 (2013.01); G01N 31/22 (2013.01); G01N 31/223 (2013.01); G01N 31/226 (2013.01); H01J 37/32935 (2013.01); H01L 21/3065 (2013.01); C01P 2006/60 (2013.01); C04B 2235/3239 (2013.01); C04B 2235/3256 (2013.01); C04B 2235/3258 (2013.01); C04B 2235/3298 (2013.01); C04B 2235/5436 (2013.01); G01N 21/718 (2013.01); H01J 37/32449 (2013.01); H01J 37/32541 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3341 (2013.01); H01L 21/32136 (2013.01);
Abstract

The present invention provides a plasma treatment detection indicator including a color-changing layer that changes color by plasma treatment, exhibiting excellent heat resistance, with the gasification of the color-changing layer or the scattering of the fine debris of the color-changing layer caused by the plasma treatment being suppressed to such a degree as to not affect the electronic device properties. Specifically, the present invention provides a plasma treatment detection indicator including a color-changing layer that changes color by plasma treatment, the color-changing layer containing at least one metal element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi in the form of a simple substance and/or an inorganic compound containing at least one metal element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi.

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