Optical module, in particular opto-electronic module, and method of manufacturing the same

Abstract

The optical module () comprises—a first member (O) having a first face (F) which is substantially planar;—a second member (P) having a second face (F) facing the first face (F), which is substantially planar and is aligned substantially parallel to the first face;—a third member (S) comprised in the first member (O) or comprised in the second member (P) or distinct from and located between these, which comprises an opening ();—a mirror element () present on the second face (F); and—an active optical component () present on the second face (F) and electrically connected to the second member (P); wherein at least one of the first and second members comprises one or more transparent portions (t) through which light can pass. The method for manufacturing the optical module () comprises the steps of a) providing a first wafer; b) providing a second wafer on which the mirror elements () are present; c) providing a third wafer, wherein the third wafer is comprised in the first wafer or is comprised in the second wafer or is distinct from these, and wherein the third wafer comprises openings (); e) forming a wafer stack comprising these wafers; wherein at least one of the first wafer and the second wafer comprises transparent portions (t) through which light can pass.