The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2019
Filed:
Jul. 24, 2015
Amo Manufacturing Usa, Llc, Santa Ana, CA (US);
Ihor Berezhnyy, Los Gatos, CA (US);
Anatoly Fabrikant, Fremont, CA (US);
Guangming Dai, Fremont, CA (US);
Benjamin Logan, Los Gatos, CA (US);
Anthony Tang, San Jose, CA (US);
Henry Price, San Jose, CA (US);
Stephen Calebotta, Saratoga, CA (US);
AMO Manufacturing USA, LLC, Santa Ana, CA (US);
Abstract
Embodiments of the present invention generally describe systems, devices, and methods for directly measuring pulse profiles during pulse delivery. In some embodiment, the pulse profiles may be measured while the pulse is delivered to ablate a material. Embodiments, may calculate ablation spot parameters based on the pulse profiles and may refine one or more subsequent laser pulses based on deviations from the calculated ablation spot parameters from desired ablation spot parameters. In some embodiments, a fluence profiler is provided. The fluence profiler may measure a pulse profile of a laser pulse from a portion of the laser pulse. The fluence profiler may utilize a UV radiation energy sensor device and a camera-based imager. The measurements from the UV radiation energy sensor device and the camera-based imager may be combined and scaled to provide a measured pulse profile that corresponds to the delivered pulse.