The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 08, 2019

Filed:

Apr. 28, 2016
Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventors:

Yu Saitoh, Osaka, JP;

Takashi Tsuno, Osaka, JP;

Toru Hiyoshi, Osaka, JP;

Kosuke Uchida, Osaka, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 29/40 (2006.01); H01L 21/04 (2006.01); H01L 23/482 (2006.01); H01L 29/04 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 29/408 (2013.01); H01L 21/046 (2013.01); H01L 21/049 (2013.01); H01L 22/10 (2013.01); H01L 23/4824 (2013.01); H01L 29/045 (2013.01); H01L 29/4236 (2013.01); H01L 29/66068 (2013.01); H01L 29/7813 (2013.01); H01L 29/1608 (2013.01);
Abstract

A silicon carbide semiconductor device includes a gate insulating film and a gate electrode. A first main surface is provided with a trench defined by a side surface penetrating a third impurity region and a second impurity region to reach a first impurity region, and a bottom provided continuously with the side surface. In a stress test in which a gate voltage of at least one of −10 V and 20 V is applied to the gate electrode for 100 hours at a temperature of 175° C., where a threshold voltage before the stress test is defined as a first threshold voltage and a threshold voltage after the stress test is defined as a second threshold voltage, an absolute value of a difference between the first threshold voltage and the second threshold voltage is not more than 0.25 V. The second threshold voltage is not less than 2.5 V.


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