The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Oct. 11, 2017
Applicant:
Lawrence Livermore National Security, Llc, Livermore, CA (US);
Inventor:
Aiden Alexander Martin, Walnut Creek, CA (US);
Assignee:
Lawrence Livermore National Security, LLC, Livermore, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 14/06 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02266 (2013.01); C23C 14/067 (2013.01); C23C 14/221 (2013.01); H01L 21/02175 (2013.01); H01L 21/02205 (2013.01);
Abstract
A method for produce a boron containing film by admitting a gaseous boron precursor into a vacuum chamber containing a substrate and directing an electron beam or ion beam into the vacuum chamber onto to the surface of the substrate. The electron beam or ion beam dissociates the gaseous boron precursor at the surface of the substrate creating non-volatile fragments that bind to the substrate surface forming a boron containing film.