The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 08, 2019

Filed:

Dec. 15, 2015
Applicants:

China Triumph International Engineering Co., Ltd., Shanghai, CN;

Ctf Solar Gmbh, Dresden, DE;

Inventors:

Velappan Krishnakumar, Dresden, DE;

Harr Michael, Dresden, DE;

Assignees:

CHINA TRIUMPH INTERNATIONAL ENGINEERING CO., LTD., Putuo District, Shanghai, CN;

CTF SOLAR GMBH, Dresden, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 31/0224 (2006.01); H01L 31/073 (2012.01); H01L 31/18 (2006.01); C23C 22/76 (2006.01); H01L 31/0296 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02255 (2013.01); C23C 22/76 (2013.01); H01L 31/0296 (2013.01); H01L 31/022425 (2013.01); H01L 31/022466 (2013.01); H01L 31/073 (2013.01); H01L 31/1836 (2013.01); H01L 31/1884 (2013.01); Y02E 10/543 (2013.01);
Abstract

The present invention proposes a method to form a gradient thin film using a spray pyrolysis technique. The method comprises providing a base substrate, preparing a spray aqueous solution by mixing at least two precursor compounds comprising at least two different elements and spraying the spray aqueous solution onto the base substrate. According to the present invention, the ratio of the concentration of the at least two different elements within the spray aqueous solution is varied while performing the method. In this way, a thin film having a gradient of elemental composition over its layer thickness may be formed.


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