The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Aug. 14, 2017
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Robert G. Biskeborn, Hollister, CA (US);
Calvin S. Lo, Saratoga, CA (US);
Teya Topuria, San Jose, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/39 (2006.01); C23C 14/08 (2006.01); C23C 14/02 (2006.01); G11B 5/008 (2006.01); G11B 5/31 (2006.01); C23C 14/34 (2006.01); G11B 5/127 (2006.01); G11B 5/41 (2006.01); G11B 15/46 (2006.01); H01L 43/02 (2006.01); H01L 43/08 (2006.01);
U.S. Cl.
CPC ...
G11B 5/3909 (2013.01); C23C 14/021 (2013.01); C23C 14/022 (2013.01); C23C 14/081 (2013.01); C23C 14/34 (2013.01); G11B 5/00813 (2013.01); G11B 5/00826 (2013.01); G11B 5/1272 (2013.01); G11B 5/3163 (2013.01); G11B 5/41 (2013.01); G11B 15/46 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01); G11B 2005/3996 (2013.01);
Abstract
In one general embodiment, a method includes forming a first magnetic layer, forming a tunnel barrier layer above the first magnetic layer, and forming a second magnetic layer above the tunnel barrier layer. The tunnel barrier layer includes crystalline alumina. The tunnel barrier layer is formed at a temperature of less than 100 degrees centigrade.