The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Mar. 18, 2016
Infineon Technologies Ag, Neubiberg, DE;
Athanasios Kollias, Munich, DE;
Matthias Friedrich Herrmann, Munich, DE;
Christian Ebner, Munich, DE;
Ernesto Romani, Munich, DE;
Stephan Mechnig, Munich, DE;
Joseph Hufschmitt, Munich, DE;
Andreas Wiesbauer, Poertschach, AT;
Christian Jenkner, Klagenfurt, AT;
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Abstract
An embodiment includes a method of performing a measurement using a micro-electro-mechanical system (MEMS) device that includes a plurality of MEMS sensors having different resonant frequencies. The method includes applying an excitation signal to a first port of the MEMS device such that each of the plurality of the MEMS sensors is stimulated by the excitation signal. The method further includes measuring a signal at a second port of the MEMS device and determining a measured value based on the measuring the signal.