The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Jun. 10, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Faruk Gungor, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); G01H 13/00 (2006.01); G01P 15/09 (2006.01); G01H 9/00 (2006.01); G01F 23/28 (2006.01);
U.S. Cl.
CPC ...
G01H 9/00 (2013.01); C23C 16/448 (2013.01); G01H 13/00 (2013.01); G01P 15/09 (2013.01); G01F 23/28 (2013.01);
Abstract
Embodiments of apparatus for sensing a level of a processing medium in a chemical delivery apparatus are provided herein. In some embodiments, a chemical delivery apparatus includes: a support structure; a container coupled to the support structure to hold a chemical precursor within an interior of the container; an excitation source configured to cause vibrations in an exterior surface of the container; and a measurement device configured to measure a frequency of the vibrations.