The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Feb. 01, 2017
Fujikura Ltd., Tokyo, JP;
FUJIKURA LTD., Tokyo, JP;
Abstract
A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.