The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Oct. 10, 2017
Applicant:
Siva Power, Inc., San Jose, CA (US);
Inventors:
Markus Eberhard Beck, Scotts Valley, CA (US);
Ulrich Alexander Bonne, Sunnyvale, CA (US);
Robert G. Wendt, Gilroy, CA (US);
Assignee:
SIVA POWER, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 14/26 (2006.01); H01L 31/046 (2014.01); C23C 16/448 (2006.01); F25B 39/00 (2006.01); H01L 31/032 (2006.01); H01L 31/18 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); C23C 16/02 (2006.01); C23C 16/28 (2006.01); C23C 16/52 (2006.01); C23C 14/24 (2006.01); C23C 14/54 (2006.01); F25D 17/02 (2006.01); F28D 15/00 (2006.01); F25B 39/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 14/26 (2013.01); C23C 14/24 (2013.01); C23C 14/243 (2013.01); C23C 14/542 (2013.01); C23C 16/0209 (2013.01); C23C 16/28 (2013.01); C23C 16/448 (2013.01); C23C 16/4485 (2013.01); C23C 16/52 (2013.01); F25B 39/00 (2013.01); F25D 17/02 (2013.01); F28D 15/00 (2013.01); H01L 31/0322 (2013.01); H01L 31/0326 (2013.01); H01L 31/046 (2014.12); H01L 31/18 (2013.01); H01L 51/001 (2013.01); H01L 51/56 (2013.01); F25B 39/02 (2013.01); H01L 21/02568 (2013.01); H01L 21/02631 (2013.01);
Abstract
In various embodiments, evaporation sources are heated and/or cooled via a fluid-based thermal management system during deposition of thin films.