The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Feb. 22, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Tae Kyung Won, San Jose, CA (US);
Dong-kil Yim, Pleasanton, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of the disclosure generally provide methods of forming thin film transistor (TFT) device structure with good interface management between a metal electrode layer and a nearby insulating material so as to provide high electrical performance devices, or for other suitable display applications. In one embodiment, a thin film transistor structure includes a metal electrode layer disposed on a barrier layer formed above a gate insulating material layer, an interface layer disposed on the metal electrode layer, wherein the interface layer is an oxygen free dielectric material layer sized to be formed predominately on the metal electrode layer, and an insulating material layer disposed on the interface layer, wherein the insulating material layer is an oxygen containing dielectric layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile