The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Aug. 24, 2017
Samsung Electronics Co., Ltd., Suwon-si, KR;
Min-Gu Chang, Anyang-si, KR;
Sang-Hui Lee, Andong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, KR;
Abstract
In one embodiment a transferring apparatus comprises a rail connected to a frame, a travelling part including a wheel that travels along the rail and a loading part for loading an object, and a particle collection receptacle provided at a side of the rail and configured to collect particles generated due to friction between the wheel and the rail when the wheel travels along the rail. A method of manufacturing an integrated circuit device using the transferring apparatus includes moving the travelling part to the object, picking up the object with the loading part thereby loading the object on the loading part, using the travelling part to move the object to a chamber, and forming a semiconductor device using the object.