The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Mar. 29, 2017
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventor:
Martin Glodde, Pine Brook, NJ (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 23/29 (2006.01); H01L 23/31 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02301 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 23/293 (2013.01); H01L 23/3171 (2013.01); H01L 21/0273 (2013.01);
Abstract
Embodiments are directed to a method and resulting structures for improving the adhesion of a polymer to the surface of a substrate. A substrate is formed and a surface of the substrate is modified to include X—H functional group terminations. A polymer is formed on the modified surface of the substrate. The polymer and substrate are heated to chemically bond the polymer to the surface of the substrate.