The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 01, 2019

Filed:

Sep. 29, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Kazue Uchida, Utsunomiya, JP;

Kazuhiko Momoki, Koshigaya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/00 (2006.01); G02B 1/115 (2015.01); G02B 1/118 (2015.01);
U.S. Cl.
CPC ...
G02B 1/115 (2013.01); G02B 1/118 (2013.01); G02B 27/0018 (2013.01);
Abstract

The antireflection coating is a multi-layer film to be formed on a surface of a substrate. The film includes multiple layers including an uppermost layer most distant from the substrate among the multiple layers, and a lower layer including at least one layer other than the uppermost layer. A refractive index nof the uppermost layer for a wavelength of λ (nm) satisfies a condition of 1.11≤n≤1.3. An optical admittance Y of the lower layer is expressed by Y=a+ib, and a and b in the optical admittance satisfy conditions of (a−1.13)+(b−0.24)≤0.45for λ=430, (a−1.33)+(b+0.05)≤0.25for λ=900 and (a−1.14)+(b+0.25)≤0.29for λ=1800.


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