The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10168354 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 01, 2019

Filed:

Mar. 19, 2018
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventor:

Masato Hirade, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01);
Abstract

In a scanning probe microscope including a condensing optical system which includes a laser beam source, a collimator lens and a focus lens, a cantilever, and a detector, the condensing optical system including a cylindrical lens barrel having the laser beam source fixed to one end thereof, and a cylindrical lens mount which is coaxially disposed inside the lens barrel and has the collimator lens fixed to an end portion close to the laser beam source and the focus lens fixed to the opposite end portion, ring-shaped elastic members and are attached to the outer circumferential surface of the lens mount.


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