The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
May. 12, 2016
Applicant:
Nanyang Technological University, Singapore, SG;
Inventors:
Fengwei Huo, Singapore, SG;
Jin Wu, Singapore, SG;
Assignee:
NANYANG TECHNOLOGICAL UNIVERSITY, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); G01Q 10/06 (2010.01); G01Q 60/22 (2010.01); G01Q 70/06 (2010.01); G01Q 70/14 (2010.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G01Q 10/065 (2013.01); G01Q 20/02 (2013.01); G01Q 60/22 (2013.01); G01Q 70/06 (2013.01); G01Q 70/14 (2013.01); G02B 21/002 (2013.01);
Abstract
An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.