The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Jan. 27, 2016
Northrop Grumman Litef Gmbh, Freiburg, DE;
Stefan Koenig, Staufen, DE;
Peter Leinfelder, Ehrenkirchen, DE;
Northrop Grumman LITEF GmbH, , DE;
Abstract
The invention relates to an acceleration sensor () having a sensor material () which is mounted by means of spring elements () so as to be movable along a movement axis (x) over a substrate (), first trim electrodes () which are connected to the sensor material (), and second trim electrodes () which are connected to the substrate () and are associated with the first trim electrodes (). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material () is generated by the spring elements (), and when the sensor material () is deflected, an electrostatic force acting on the sensor material (), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes () and the second trim elements ().