X-ray fluorescence spectrometer

Abstract

The present invention has an object to provide an X-ray fluorescence spectrometer capable of preventing a decrease in analysis precision of light elements whose atomic number is less than 23 and making helium gas replacement for the inside of an analysis chamber more efficient. An X-ray fluorescence spectrometer of the present invention includes: an X-ray tubefor irradiating a sample S on a sample stagewith a primary X-ray, the sample stagehaving an X-ray passing port; a detectorfor detecting a fluorescent X-ray emitted from the sample S; an analysis chamberhaving an introduction portfor the primary X-ray emitted from the X-ray tubeand a detection portfor the detector, the analysis chambercontaining an internal space including an optical path of the primary X-ray from the introduction portto the X-ray passing portand an optical path of the fluorescent X-ray from the X-ray passing portto the detection port; first and second introduction pipesandfor introducing helium gas supplied from a helium gas cylinderinto the analysis chamberthrough the introduction portand the detection port, respectively; and a flow rate control valvefor controlling a helium gas flow rate in each of the first and second introduction pipesand