The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 01, 2019

Filed:

Jan. 20, 2017
Applicant:

Olympus Corporation, Tokyo, JP;

Inventor:

Hiroya Fukuyama, Tokyo, JP;

Assignee:

OLYMPUS CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); G02B 26/10 (2006.01); G01N 21/64 (2006.01); G02B 21/00 (2006.01); G02B 21/16 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6458 (2013.01); G02B 21/006 (2013.01); G02B 21/0032 (2013.01); G02B 21/0048 (2013.01); G02B 21/0072 (2013.01); G02B 21/16 (2013.01); G01N 2021/6478 (2013.01); G01N 2201/0635 (2013.01);
Abstract

Acquiring a sharp final image by preventing, even when an intermediate image is formed at a position overlapping an optical element, a flaw or the like on the optical element from being superimposed on the intermediate image. An observation apparatus including: an image-forming optical system having image-forming lenses that form a final image and an intermediate image, a first phase modulator that applies a spatial disturbance to the wavefront of light, and a second phase modulator that cancels out the spatial disturbance; a light source; an XY-scanning part including a first and a second scanner; and a photodetector. The two phase modulators are disposed at positions optically conjugate with the first scanner and have one-dimensional phase-distribution characteristics changing in the scanning direction of the illumination light.


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