The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Jun. 28, 2016
Ihi Corporation, Koto-ku, JP;
The University of Tokyo, Bunkyo-ku, JP;
Takeshi Nakamura, Tokyo, JP;
Kozue Hotozuka, Tokyo, JP;
Yasuyuki Fukushima, Tokyo, JP;
Yukihiro Shimogaki, Tokyo, JP;
Takeshi Momose, Tokyo, JP;
Hidetoshi Sugiura, Tokyo, JP;
Kohei Shima, Tokyo, JP;
Yuichi Funato, Tokyo, JP;
IHI CORPORATION, Koto-ku, JP;
THE UNIVERSITY OF TOKYO, Bunkyo-ku, JP;
Abstract
In the present embodiment, in the production of a heat-resistant composite material resulting from impregnating a ceramic fiber preform with silicon carbide, a mixed gas containing starting material gas, an additive gas, and a carrier gas is supplied to a substrate having a minute structure such as a preform stored in an electric furnace, silicon carbide is deposited to form a film by means of a chemical vapor deposition method or a chemical vapor infiltration method, and the film formation growth speed and embedding uniformity are controlled by means of the amount of additive gas added to the starting material gas, the starting material gas contains tetramethylsilane, and the additive gas contains a molecule containing chlorine such as methyl chloride or hydrogen chloride. The film formation growth speed and embedding uniformity of the silicon carbide are both achieved.