The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Apr. 25, 2016
Applicant:
3m Innovative Properties Company, St. Paul, MN (US);
Inventors:
John T. Strand, Stillwater, MN (US);
David B. Olson, Hudson, WI (US);
Assignee:
3M INNOVATIVE PROPERTIES COMPANY, St. Paul, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); G03F 7/00 (2006.01); B05D 1/28 (2006.01); B05D 3/00 (2006.01); B05D 3/06 (2006.01); C23C 14/02 (2006.01); C23C 14/58 (2006.01); B29C 41/00 (2006.01); C08J 5/18 (2006.01); C08J 7/12 (2006.01); C08F 220/28 (2006.01); C09D 4/00 (2006.01); G03F 7/027 (2006.01); H01L 21/027 (2006.01); B29L 9/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/34 (2013.01); B05D 1/28 (2013.01); B05D 3/007 (2013.01); B05D 3/067 (2013.01); B29C 41/003 (2013.01); C08F 220/28 (2013.01); C08J 5/18 (2013.01); C08J 7/12 (2013.01); C09D 4/00 (2013.01); C23C 14/021 (2013.01); C23C 14/58 (2013.01); G03F 7/0002 (2013.01); G03F 7/027 (2013.01); H01L 21/0272 (2013.01); B29L 2009/008 (2013.01); C08F 2220/286 (2013.01); C08J 2333/14 (2013.01);
Abstract
Compositions of matter capable of being cast and cured to form a microreplicated pattern on a substrate, and further capable of swelling on exposure to water so as to release from that substrate. Water swellable acrylic polymers formed from these compositions, and methods of using same in nanoimprint lithography are also disclosed.