The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Apr. 20, 2017
Applicant:
Nanoco Technologies Ltd., Manchester, GB;
Inventor:
Stuart Stubbs, Manchester, GB;
Assignee:
Nanoco Technologies Ltd., Manchester, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); H01L 33/42 (2010.01); H01L 31/0224 (2006.01); C23C 14/34 (2006.01); C03C 17/245 (2006.01); H01B 1/08 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
C23C 14/086 (2013.01); C03C 17/2453 (2013.01); C23C 14/34 (2013.01); H01B 1/08 (2013.01); H01L 31/022475 (2013.01); H01L 31/1884 (2013.01); H01L 33/42 (2013.01); C03C 2218/154 (2013.01);
Abstract
An indium tin oxide film containing by weight about 90% InOand about 10% SnOis prepared using a low-energy deposition sputter process on a substrate. The indium tin oxide film thus obtained has a carrier concentration on the order of 10/cmand a carrier mobility greater than 30 cm/Vs. The low carrier concentration results in an increased transmission in the near infra-red region, while the high carrier mobility results in good conductive properties.