The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Mar. 09, 2014
Applicant:

Japan Science and Technology Agency, Kawaguchi-shi, Saitama, JP;

Inventors:

Yutaka Majima, Yokohama, JP;

Toshiharu Teranishi, Uji, JP;

Shuhei Takeshita, Yokohama, JP;

Assignee:

JAPAN SCIENCE AND TECHNOLOGY AGENCY, Kawaguchi-shi, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 31/09 (2006.01); H01L 21/445 (2006.01); B82Y 10/00 (2011.01); H01L 29/417 (2006.01); H01L 29/12 (2006.01); H01L 29/06 (2006.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
H01L 29/7613 (2013.01); B82Y 10/00 (2013.01); H01L 21/445 (2013.01); H01L 29/0649 (2013.01); H01L 29/0665 (2013.01); H01L 29/127 (2013.01); H01L 29/41725 (2013.01); H01L 31/09 (2013.01); B82Y 30/00 (2013.01);
Abstract

Art electrode pair enables the performance of a device to be accurately delivered, a method for manufacturing the same. An electrode pair, wherein one electrodeA and the other electrodeB are provided on the same plane so as to face each other with a gaptherebetween, and portions of the one electrodeA and the oilier electrodeB facing each other are respectively curved so as to get away from the plane along a direction nearing each other. This electrode pairis manufactured by preparing, as a sample, a substrate on which a pair of seed electrodes is formed with a space therebetween so as to have an initial gap, immersing the sample in an electroless plating solution, changing the electroless plating solution after a lapse of a certain period of time, and adjusting the number of times of changing.


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