The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Mar. 24, 2008
J. B. Price, Los Gatos, CA (US);
Jed Keller, Los Gatos, CA (US);
Laurence Dulmage, Nevada City, CA (US);
David Adams, Belmont, CA (US);
Eric Winger, Campbell, CA (US);
Lawrence Wise, Mountain View, CA (US);
J. B. Price, Los Gatos, CA (US);
Jed Keller, Los Gatos, CA (US);
Laurence Dulmage, Nevada City, CA (US);
David Adams, Belmont, CA (US);
Eric Winger, Campbell, CA (US);
Lawrence Wise, Mountain View, CA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile