Silicon film optical filtering systems and methods of fabrication

Abstract

An optical filter has a layer of silicon film deposited onto a metallic substrate surface at a silicon film thickness corresponding to a wavelength of light to be filtered from incoming light. The critical coupling of light to the optical cavity formed by the silicon film on metal surface results in a strong and near perfect absorption of the light at a resonance wavelength and strong absorption in the wavelength region near the peak absorption wavelength. Other wavelengths of the incoming wave are reflected by the device so the spectral content of light is changed. By controlling the thickness of the silicon film and/or other factors, such as the extent to which the silicon film is annealed or the type of metal beneath the silicon film, the wavelength of the light absorbed by the silicon film can be precisely controlled.