The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Nov. 16, 2017
Applicant:

Allegro Microsystems, Llc, Manchester, NH (US);

Inventors:

William P. Taylor, Amherst, NH (US);

Harianto Wong, Southborough, MA (US);

Assignee:

Allegro MicroSystems, LLC, Manchester, NH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/04 (2006.01); H01L 43/06 (2006.01); H01L 43/10 (2006.01); H01L 43/14 (2006.01); G01R 33/07 (2006.01); G01R 33/00 (2006.01); H01L 23/48 (2006.01); H01L 27/22 (2006.01);
U.S. Cl.
CPC ...
G01R 33/07 (2013.01); G01R 33/0052 (2013.01); H01L 23/481 (2013.01); H01L 27/22 (2013.01); H01L 43/04 (2013.01); H01L 43/06 (2013.01); H01L 43/065 (2013.01); H01L 43/10 (2013.01); H01L 43/14 (2013.01); H01L 2224/4826 (2013.01); H01L 2224/48091 (2013.01);
Abstract

In one aspect, a Hall Effect sensing element includes a Hall plate having a thickness less than about 100 nanometers an adhesion layer directly in contact with the Hall plate and having a thickness in a range about 0.1 nanometers to 5 nanometers. In another aspect, a sensor includes a Hall Effect sensing element. The Hall Effect sensing element includes a substrate that includes one of a semiconductor material or an insulator material, an insulation layer in direct contact with the substrate, an adhesion layer having a thickness in a range of about 0.1 nanometers to 5 nanometers and in direct contact with the insulation layer and a Hall plate in direct contact with the adhesion layer and having a thickness less than about 100 nanometers.


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