The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Nov. 09, 2017
Applicant:

The United States of America, As Represented BY the Secretary of Commerce, Washington, DC (US);

Inventors:

Vladimir A. Aksyuk, Gaithersburg, MD (US);

Kartik Srinivasan, Rockville, MD (US);

Thomas Michels, Dortmund, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/17 (2006.01); G02B 6/02 (2006.01); H01L 21/67 (2006.01); G01Q 70/08 (2010.01); G01Q 70/02 (2010.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01Q 70/08 (2013.01); G01N 21/17 (2013.01); G01Q 70/02 (2013.01); G02B 6/0208 (2013.01); G03F 7/2049 (2013.01); H01L 21/67 (2013.01);
Abstract

A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.


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