The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
May. 06, 2016
Applicant:
National Tsing Hua University, Hsinchu, TW;
Inventors:
Assignee:
NATIONAL TSING HUA UNIVERSITY, Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); H01L 21/02 (2006.01); H01L 21/4763 (2006.01); H01L 29/24 (2006.01); H01L 29/45 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0027 (2013.01); H01L 21/02422 (2013.01); H01L 21/02568 (2013.01); H01L 21/02628 (2013.01); H01L 21/47635 (2013.01); H01L 29/24 (2013.01); H01L 29/45 (2013.01);
Abstract
A molybdenum disulfide sensor includes a flexible substrate, a patterned circuit layer and at least a molybdenum disulfide sheet. The flexible substrate has a gas flow channel. The patterned circuit layer is formed on the flexible substrate, and the patterned circuit layer includes a first electrode and a second electrode. The second electrode is faced toward the first electrode, and a gap is formed between the first electrode and the second electrode. The molybdenum disulfide sheet is located in the gap and is connected with the first electrode and the second electrode.