The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Feb. 06, 2018
Applicant:

Azbil Corporation, Chiyoda-ku, JP;

Inventors:

Takuya Ishihara, Chiyoda-ku, JP;

Masaru Soeda, Chiyoda-ku, JP;

Masashi Sekine, Chiyoda-ku, JP;

Hidenobu Tochigi, Chiyoda-ku, JP;

Assignee:

AZBIL CORPORATION, Chiyoda-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G08B 21/00 (2006.01); G01L 9/12 (2006.01); G01L 9/00 (2006.01); G08B 21/18 (2006.01); G01L 19/12 (2006.01);
U.S. Cl.
CPC ...
G01L 9/125 (2013.01); G01L 9/0044 (2013.01); G01L 9/0075 (2013.01); G01L 19/12 (2013.01); G08B 21/182 (2013.01);
Abstract

A pressure change measuring unit causes a temperature control unit to operate and vary the temperature of a sensor chip in a predetermined temperature range, and measures changes in pressure value output from the sensor chip whose temperature is being varied. A temperature characteristic calculating unit calculates a temperature characteristic of the sensor chip from changes in the temperature of the sensor chip caused by the operation of the temperature control unit and changes in pressure value measured by the pressure change measuring unit.


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