The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Jun. 15, 2016
Applicant:

Purdue Research Foundation, West Lafayette, IN (US);

Inventors:

Alina Alexeenko, West Lafayette, IN (US);

Andrew Strongrich, Saginaw, MI (US);

Assignee:

PURDUE RESEARCH FOUNDATION, West Lafayette, IN (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 7/00 (2006.01); G01N 9/00 (2006.01); G01L 9/00 (2006.01); G01N 27/22 (2006.01);
U.S. Cl.
CPC ...
G01L 9/00 (2013.01); G01N 27/226 (2013.01);
Abstract

A system operating based on Knudsen thermal force includes a microelectromechanical (MEMS) gas sensor, the MEMS gas sensor includes a substrate. The sensor further includes at least one stationary assembly fixedly coupled to the substrate, the at least one stationary assembly terminating at corresponding pads configured to receive an electrical current for heating the at least one stationary assembly. Additionally, the sensor includes at least one moveable assembly disposed above the substrate and biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly.


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