The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Oct. 23, 2014
Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

Felix Mayer, Baar, CH;

Marc Von Waldkirch, Zurich, CH;

Johannes Buhler, Uster, CH;

Rene Hummel, Baar, CH;

Stephan Braun, Stafa, CH;

Marion Hermersdorf, Rodermark, DE;

Chung-Hsien Lin, Hsinchu, TW;

Assignee:

InvenSense, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 7/02 (2006.01); H01L 21/76 (2006.01); G01L 19/14 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
G01L 7/024 (2013.01); B81B 7/0054 (2013.01); G01L 7/022 (2013.01); G01L 19/146 (2013.01); H01L 21/76 (2013.01); B81B 2201/0264 (2013.01); B81B 2207/012 (2013.01); B81B 2207/096 (2013.01); B81C 2203/0792 (2013.01); Y10T 29/49002 (2015.01); Y10T 29/49204 (2015.01);
Abstract

A pressure sensor comprises a first substrate containing a processing circuit integrated thereon and a cap attached to the first substrate. The cap includes a container, a holder, and one or more suspension elements for suspending the container from the holder. The container includes a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. The container is suspended from the holder such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit.


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