The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Jul. 26, 2016
Eugene Technology Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;
Jun Jin Hyon, Gunpo-Si, KR;
Sung Tae Je, Yongin-Si, KR;
Byoung Gyu Song, Yongin-Si, KR;
Yong Ki Kim, Osan-Si, KR;
Kyoung Hun Kim, Yongin-Si, KR;
Chang Dol Kim, Yongin-Si, KR;
Yang Sik Shin, Yongin-Si, KR;
Jae Woo Kim, Bucheon-Si, KR;
EUGENE TECHNOLOGY CO., LTD., , KR;
Abstract
The present invention may include: a tube providing an interior space in which substrates are processed; a substrate support portion stacking a plurality of substrates in the interior space of the tube in multi-level; a gas supply portion supplying a process gas to the plurality of substrates; an exhaust portion disposed to face the gas supply portion to absorb the process gas; and a flowage adjustment portion having spray openings formed along a circumference of the tube between the gas supply portion and the exhaust portion to spray an adjusting gas, and may be capable of controlling the amount of process gas supplied to an upper surface of the substrate by adjusting the flowage of process gas.