The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Oct. 27, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Joseph Vincent, Bangalore, IN;
Michael Kuchar, Georgetown, TX (US);
Dean C. Hruzek, Cedar Park, TX (US);
Vijayabaskar Soundarrajan, Bangalore, IN;
Pandu Maddherla, Bangalore, IN;
Adam J. Wyatt, Round Rock, TX (US);
Robert M. McAndrew, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.