The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 18, 2018

Filed:

Apr. 18, 2014
Applicant:

Cornell University, Ithaca, NY (US);

Inventors:

Amit Lal, Ithaca, NY (US);

Sachin Nadig, Ithaca, NY (US);

Serhan Mehmet Ardanuc, Ithaca, NY (US);

Assignee:

CORNELL UNIVERSITY, Ithaca, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/113 (2006.01); H02N 2/10 (2006.01); G01C 19/5755 (2012.01); G01C 19/5769 (2012.01); G01P 15/09 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01); H01L 41/332 (2013.01); H01L 41/335 (2013.01); H01L 41/29 (2013.01); H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0933 (2013.01); G01C 19/5755 (2013.01); G01C 19/5769 (2013.01); G01P 15/0922 (2013.01); H01L 41/0471 (2013.01); H01L 41/053 (2013.01); H01L 41/096 (2013.01); H01L 41/0953 (2013.01); H01L 41/113 (2013.01); H01L 41/1132 (2013.01); H01L 41/29 (2013.01); H01L 41/332 (2013.01); H01L 41/335 (2013.01); H02N 2/0095 (2013.01); H02N 2/108 (2013.01);
Abstract

A monolithic, bulk piezoelectric actuator includes a bulk piezoelectric substrate having a starting top surface and an opposing starting bottom surface and a at least two electrodes operatively disposed on the bulk piezoelectric substrate consisting of at least two discrete electrodes disposed on either/both of the starting top surface and the starting bottom surface and at least one electrode disposed on the respective other starting bottom surface or starting top surface. A stage includes a base, at least two of the monolithic, bulk piezoelectric actuators disposed on the base, a movable platform disposed on the base, and a respective number of deformable connectors each having a first connection to a respective one of the piezoelectric actuators and a second connection to a respective portion of the movable platform. A method for monolithically making a monolithic, bulk piezoelectric actuator involves a direct write micropatterning technique.


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