The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Apr. 29, 2011
Mathieu Kociak, Palaiseau, FR;
Luiz Fernando Zagonel, Campanas, BR;
Marcel Tence, Issy les Moulineaux, FR;
Stefano Mazzucco, Bethesda, MD (US);
Mathieu Kociak, Palaiseau, FR;
Luiz Fernando Zagonel, Campanas, BR;
Marcel Tence, Issy les Moulineaux, FR;
Stefano Mazzucco, Bethesda, MD (US);
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris, FR;
UNIVERSITE PARIS SUD 11, Orsay, FR;
Abstract
The invention relates to a cathodoluminescence detection system comprising: a collecting optic () collecting light radiation () from a sample illuminated by a beam of charged particles and reflecting said radiation () onto analysis means, said collecting optic () being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means () for adapting the light radiation, placed downstream of the collecting optic () and designed to adapt said light radiation () at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means () is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.