The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Jun. 13, 2016
Nisshin Steel Co., Ltd., Tokyo, JP;
NISSHIN STEEL CO., LTD., Tokyo, JP;
Abstract
The purpose of the present invention is to provide a method for stripping a resist film, which includes a cured resin having a phosphate ester group or a carboxyl group, by using a resist stripping solution having high strippability, the method being characterized in that deterioration of the strippability of the resist stripping solution is suppressed and the phosphorus concentration in the resist stripping solution is not substantially increased. In this method, a resist stripping solution is brought into contact with a resist film, which includes a cured resin having a phosphate ester group or a carboxyl group and is disposed on a metal plate, and the resist film is stripped from the metal plate. In this method, the resist stripping solution contains a benzyl alcohol, water in a mass ratio to the benzyl alcohol of 0.3-2.5, and a surfactant, and is substantially free of caustic alkali components.