The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Mar. 17, 2015
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Ken Oikawa, Tokyo, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); F25B 9/00 (2006.01);
U.S. Cl.
CPC ...
F04B 37/085 (2013.01); F17C 2250/03 (2013.01); F17C 2250/043 (2013.01); F17C 2250/06 (2013.01); F17C 2250/0631 (2013.01); F25B 9/00 (2013.01);
Abstract
A method of regenerating a cryopump includes: supplying a purge gas to a cryopump in order to heat a cryopanel to a first temperature zone higher than the melting point of water; suspending supply of the purge gas to the cryopump while a cryopanel temperature is in the first temperature zone, and heating the cryopanel from the first temperature zone to a second temperature zone higher than a purge gas temperature.