The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Apr. 21, 2016
Applicant:

Canon Anelva Corporation, Kawasaki-shi, JP;

Inventors:

Takuya Seino, Kawasaki, JP;

Yuichi Otani, Kawasaki, JP;

Kazumasa Nishimura, Kawasaki, JP;

Assignee:

CANON ANELVA CORPORATION, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/22 (2006.01); H01L 43/12 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01F 41/30 (2006.01); H01F 10/12 (2006.01); H01F 10/32 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01F 41/302 (2013.01); H01L 21/67109 (2013.01); H01L 21/68742 (2013.01); H01L 27/222 (2013.01); H01F 10/123 (2013.01); H01F 10/3286 (2013.01);
Abstract

This invention provides a manufacturing method of a magnetoresistive effect element having a higher MR ratio than a conventional element. A manufacturing method of a magnetoresistive effect element of an embodiment of the invention includes: a step of forming a tunnel barrier layer on a substrate, on a surface of which one of a magnetization free layer and a magnetization fixed layer is formed; a step of cooling the substrate after the step of forming a tunnel barrier layer; a step of forming an other one of the magnetization free layer and the magnetization fixed layer on the tunnel barrier layer after the step of cooling; and a step of raising a temperature of the substrate after the step of forming the other one of the magnetization free layer and the magnetization fixed layer.


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