The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Oct. 22, 2013
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventor:

Carl O. Bozler, Waltham, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G09F 9/37 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01); H01L 29/84 (2006.01); B82Y 10/00 (2011.01); G11C 23/00 (2006.01); H01L 29/78 (2006.01); H01H 59/00 (2006.01); H01L 29/68 (2006.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); B82Y 10/00 (2013.01); G11C 23/00 (2013.01); H01L 29/78 (2013.01); H01H 59/0009 (2013.01); H01L 29/685 (2013.01);
Abstract

A mechanical memory transistor includes a substrate having formed thereon a source region and a drain region. An oxide is formed upon a portion of the source region and upon a portion of the drain region. A pull up electrode is positioned above the substrate such that a gap is formed between the pull up electrode and the substrate. A movable gate has a first position and a second position. The movable gate is located in the gap between the pull up electrode and the substrate. The movable gate is in contact with the pull up electrode when the movable gate is in a first position and is in contact with the oxide to form a gate region when the movable gate is in the second position. The movable gate, in conjunction with the source region and the drain region and when the movable gate is in the second position, form a transistor that can be utilized as a non-volatile memory element.


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