The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Jul. 14, 2017
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Naoyuki Iida, Yokkaichi, JP;

Hideki Inokuma, Yokkaichi, JP;

Naoki Yamamoto, Kuwana, JP;

Yoshihiro Yanai, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 27/11582 (2017.01); H01L 23/528 (2006.01); H01L 21/311 (2006.01); H01L 27/11565 (2017.01); H01L 27/11575 (2017.01); H01L 27/11524 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/28282 (2013.01); H01L 21/31144 (2013.01); H01L 23/528 (2013.01); H01L 27/11524 (2013.01); H01L 27/11565 (2013.01); H01L 27/11575 (2013.01);
Abstract

A memory device includes a substrate and a stacked body arranged along a first direction. The stacked body includes electrode films. A configuration of an end portion in a second direction of the stacked body is a staircase configuration. Steps corresponding to the electrode films are formed in the staircase configuration. A first distance between a first step and an end edge of the stacked body in the second direction is shorter than a second distance between a second step and the end edge in the second direction. The first step is positioned at an end portion in a third direction of the stacked body. The second step is positioned at a central portion in the third direction of the stacked body. The first and second steps correspond to two of the electrode films positioned at the same level when counting along the first direction from the substrate side.


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