The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Apr. 30, 2015
Applicant:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Inventor:

Kaname Takai, Inuyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); H01L 21/67769 (2013.01);
Abstract

Without a lateral transfer mechanism in a local vehicle, the buffering capacity of a temporary storage apparatus is increased. The temporary storage apparatus stores carriers temporarily between overhead travelling vehicles and load ports. A travelling rail for the local vehicle is provided to allow the local vehicle to run below the travelling rail for the overhead vehicles and over the load ports. A slidable buffer slidable between a position under the travelling rail for the local vehicle and a position shifted laterally and a controller for controlling the local vehicle and the slidable buffer are provided, and the local vehicle waits at a position separated from an area over the load ports.


Find Patent Forward Citations

Loading…