The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Jun. 26, 2017
Applicant:

The United States of America, As Represented BY the Secretary of Commerce, Washington, DC (US);

Inventors:

Norman A. Sanford, Boulder, CO (US);

Ann Chiaramonti Debay, Louisville, CO (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); H01J 49/40 (2006.01); H01J 49/16 (2006.01); G01N 23/046 (2018.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/0004 (2013.01); G01N 23/046 (2013.01); H01J 49/0031 (2013.01); H01J 49/161 (2013.01); H01J 49/40 (2013.01); H01J 49/004 (2013.01); H05G 2/008 (2013.01);
Abstract

A extreme ultraviolet (EUV) imaging spectrometer includes: a radiation source to: produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation, the photoions being field evaporated from the sample in response to the sample being subjected to the EUV radiation; and an ion detector to detect the photoions: as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or as a function of a position of the photoions at the ion detector.


Find Patent Forward Citations

Loading…