The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Jun. 27, 2016
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Axo Dresden Gmbh, Dresden, DE;
Martin Gall, Dresden, DE;
Ehrenfried Zschech, Moritzburg, DE;
Reiner Dietsch, Dresden, DE;
Sven Niese, Radeburg, DE;
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., Munich, DE;
AXO DRESDEN GMBH, Dresden, DE;
Abstract
The present invention relates to an illumination and imaging device for high-resolution X-ray microscopy with high photon energy, comprising an X-ray source () for emitting X-ray radiation and an area detector () for detecting the X-ray radiation. Moreover, the device comprises a monochromatizing and two-dimensionally focussing condenser-based optical system () arranged in the optical path of X-ray radiation with two reflective elements () being arranged side-by-side for focussing impinging X-ray radiation on an object to be imaged () and a diffractive X-ray lens () for imaging the object to be imaged () on the X-ray detector (). Typically, the illumination and imaging device is used for performing radiography, tomography and examination of a micro-electronic component or an iron-based material.