The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Dec. 02, 2015
Applicant:
Hitachi Automotive Systems, Ltd, Hitachinaka-shi, Ibaraki, JP;
Inventors:
Kazuo Ono, Tokyo, JP;
Toshiyuki Usagawa, Tokyo, JP;
Assignee:
HITACHI AUTOMOTIVE SYSTEMS, LTD., Ibaraki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/414 (2006.01); G01N 27/00 (2006.01); G01K 7/01 (2006.01); H01L 21/822 (2006.01); H01L 21/8234 (2006.01); H01L 21/761 (2006.01); H01L 29/78 (2006.01); H01L 27/04 (2006.01); H01L 27/06 (2006.01); H01L 27/08 (2006.01); H01L 27/088 (2006.01); H01L 23/34 (2006.01); G01R 19/10 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4141 (2013.01); G01K 7/01 (2013.01); G01N 27/00 (2013.01); G01N 27/4148 (2013.01); H01L 21/761 (2013.01); H01L 21/822 (2013.01); H01L 21/8234 (2013.01); H01L 23/34 (2013.01); H01L 27/04 (2013.01); H01L 27/06 (2013.01); H01L 27/08 (2013.01); H01L 27/088 (2013.01); H01L 29/78 (2013.01); G01R 19/10 (2013.01);
Abstract
The invention achieves a lower noise of a sense signal of a FET-type hydrogen sensor. For solving the above problem, one aspect of a sensor system of the invention includes a reference device and a sensor device configured using FETs on a substrate, and further, well potentials of the reference device and the sensor device are electrically isolated from each other.