The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Mar. 23, 2015
Applicant:
Jfe Steel Corporation, Tokyo, JP;
Inventors:
Assignee:
JFE STEEL CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 23/083 (2018.01); G01N 23/2252 (2018.01); G01N 23/207 (2018.01); H01J 37/28 (2006.01); H01J 37/256 (2006.01); H01J 37/18 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01); G01N 23/207 (2013.01); H01J 37/18 (2013.01); H01J 37/256 (2013.01); H01J 37/28 (2013.01);
Abstract
The present invention makes it possible to analyze trace carbon in a sample without the effects of contamination. In an electron probe microanalyzer, a liquid nitrogen trap and a plasma or oxygen radical generator are jointly used as a means for suppressing contamination, and two or more carbon detection units for detecting characteristic x-rays of carbon in the sample are provided.